Leica INM 20C w/ Technical Instruments Confocal Module
Confocal module by Technical Instrument Co.
Microscope: Leica INM20C
Kensington Labs model: MS4, X-Y-Z and Rotary Microscope Stage
Travel: x: 8" by y: 8" by z: 0.4"
Bearing Type: Cross Roller Bearing
Stage Length: 26"
Stage Width: 14"
Motor Drive: DC Servo Motor
Theta: 360 degrees continuos
8" vacuum wafer chuck
Wafer chuck parallel to x-y axis to less than 3 microns
Bi directional repeatability: .05 um(X-Y) and .01um(Z)
Focus wheel provides smooth high resolution manual positioning
Model 4000 controller
Can be adapted for many scopes
Power Requirements 120 V 50/60 Hz 1 Phase
Weight: 180 lbs.